The volume provides complete and up-to-date information on the few chemical species composed of silicon, fluorine, and noble gases and in the major part on the species composed of silicon, fluorine, and hydrogen. Among the numerous experimentally confirmed and theoretically predicted monosilicon Si-H-F species with Si coordination numbers 2, 3, and 4, the most prominent and best investigated molecules by far are Si H3F, Si H2F2, and Si H F3. Even more has been reported about aqueous solutions of hexafluorosilicic acid, "H2Si F6", a system which is not yet completely understood. Some of the isomers of partially fluorinated di-, tri-, and tetrasilanes are known to some extent, but information on the higher acyclic and cyclic polysilanes is increasingly sparce.