The volume is concerned exclusively with all the binary species formed between the elements silicon and fluorine such as SiF, SiF2, SiF3, SiF4, and Sif62-. Most of the volume, i.e. 144 pages, is devoted to the description of the well known physical and chemical properties of the SiF4 as well as to its preparation. This is followed in length by the report on SiF2 with its interesting chemistry, along with a section on the diatomic radical SiF. Species with fivefold and sixfold coordination of silicon are exemplified by SiF5- and by the well known SiF62-. Interestingly, the detailed models for describing the bonding situation in both ions are still a matter of discussion. While for Si2F6 most of the basic data are known, information on the chemical and physical properties of the higher members of the acylic perfluorosilanes, SinF2n+2, is scarce. All available information on the unstable cyclic perfluorosilanes of composition (SiF2)n and some even more exotic species is also included.