This book discusses the use of Auger electron spectroscopy (AES) and scanning Auger microscopy for the characterization of a wide range of technological materials, including, metals and alloys, semiconductors, nanostructures, and insulators. Its value as a tool for high-resolution elemental imaging and compositional depth profiling is illustrated and the application of the technique for obtaining compositional information from the surfaces, interfaces, and thin film structures of technological and engineering materials is demonstrated. This volume also describes the basic physical principles of AES in simple, largely qualitative terms. Major components of typical Auger spectrometers are also described. The book discusses other types of analysis for which an Auger electron spectrometer may be used, for example, secondary electron microscopy, backscattered electron imaging, X-ray spectroscopy, as well as the relationship between AES and other analysis techniques.