"Characterization Techniques for Micro/Nanoscale Devices" introduces commonly utilized and important techniques for the dynamic measurement and characterization of MEMS and NEMS devices. It outlines many of the techniques currently available for the test and characterization of MEMS and gives guidance in choosing an adequate technique for monitoring certain signals. After reading this book, MEMs designers and researchers will be able to determine the best test technique for his/her application, put together a viable experimental setup, complete the measurements, and do appropriate error and/or fatigue analysis on the collected data.