Measurement Technology for Micro-Nanometer Devices, Wendong Zhang; Xiujian Chou; Tielin Shi; Zongmin Ma; Haifei Bao; Jingdong Chen; Liguo Chen; Dachao Li; Chenyang Xue, Wiley-Blackwell

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Measurement Technology for Micro-Nanometer Devices

Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue

143,70 €

Wiley-Blackwell
Sivumäärä: 344 sivua
Asu: Kovakantinen kirja
Julkaisuvuosi: 2016, 30.12.2016 (lisätietoa)
Kieli: Englanti

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

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