Frontiers of Characterization and Metrology for Nanoelectronics : 2007 International Conference on Frontiers of Characterization, Seiler, David G. (ed.); Diebold, Alain C. (ed.); McDonald, Robert (ed.); Garner, C. Michael (ed.); Herr, Dan (ed.); Khosla, Raji, American Institute of Physics

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Frontiers of Characterization and Metrology for Nanoelectronics : 2007 International Conference on Frontiers of Characterization

David G. Seiler (ed.), Alain C. Diebold (ed.), Robert McDonald (ed.), C. Michael Garner (ed.), Dan Herr (ed.), Raji Khosla

134,40 €

American Institute of Physics
Sivumäärä: 578 sivua
Asu: Moniviestin
Painos: 2007
Julkaisuvuosi: 2007, 26.09.2007 (lisätietoa)
Kieli: Englanti
Tuotesarja: Materials Physics and Applications

This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry’s characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.

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