This book focuses on: microsystems, including micromachines and microelectromechanical systems (MEMS), as well as micro-optical-electromechanical systems (MOEMS); and nanosystems, also referred to as nanoelectromechanical systems (NEMS) or molecular machines, including devices that incorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range of physical and chemical sensor applications have been addressed with these technologies and are outlined in the book. An overall perspective on the technology required to leap from conventional micro- and nanosystems to bionanosystems, and to realize functional materials and systems for applications such as drug delivery is provided. Additional highlights include a look at the application of focused ion beam milling in characterizing MEMS devices, which is becoming a conventional tool for this purpose. The electrodeposition of structures through high aspect ratio features in thick resists is also examined. And surface and materials issues for reliability of MEMS devices are assessed and provide insight into how characterization schemes for evaluating MEMS reliability can be developed.