Fundamentals of Microfabrication explores the science of miniaturization, including its methods and materials, from the historical to the contemporary. The best-selling first edition of this book met success not only with researchers and engineers, but also in advanced undergraduate and graduate classrooms around the world. The second edition contains additional critical information. The Applications section in particular has been expanded to provide more in-depth coverage of bio-, RF-, high-temperature, and optical MEMS. Each chapter contains a set of carefully constructed problems, and a solutions manual is available with qualifying course adoption.