This book presents, for the first time, a comprehensive survey ofanalytical techniques currently used in support of all stages ofmicroelectronic materials and device processing. The diversity oftopics covered in this book has been achieved by bringing togetheran international field of authors contributing specializedindividual chapters. This has ensured that each technique isdiscussed in detail giving in-depth treatments of the subjectmatter. A particularly helpful feature in this book is the concisetechnical summary given at the end of each section. Four majorareas are considered in this volume:
* Bulk analysis of microelectronic materials

* Analysis of surfaces, interfaces and thin films

* Structure analysis on an atomic scale

* Characterization of physical, electrical and topographicfeatures
Complete with over 400 illustrations, this volume is anindispensible guide to analytical support for the microelectronicindustry.