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Fundamental Principles of Engineering Nanometrology
126,70 €
William Andrew
Sivumäärä: 352 sivua
Asu: Kovakantinen kirja
Julkaisuvuosi: 2009, 16.11.2009 (lisätietoa)
Kieli: Englanti
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.


  • Provides a basic introduction to measurement and instruments
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge


Loppuunmyyty
Myymäläsaatavuus
Helsinki
Tapiola
Turku
Tampere
Fundamental Principles of Engineering Nanometrologyzoom
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ISBN:
9780080964546
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