Advances in Mirror Technology for x-Ray, EUV Lithography, Laser and Other Applications
SPIE PressSivumäärä: 222 sivuaAsu: Pehmeäkantinen kirjaPainos: New ed.Julkaisuvuosi: 2003, 31.10.2003 (lisätietoa) Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.