This book presents a range of low-dimensional superlattice thermoelectric materials based on physical vapor deposition (PVD) methods and explores various material types, thicknesses, and processing conditions. With the advances made in the performance of semiconductor thermoelectric materials and the efficiency of thermoelectric devices in recent years, thermoelectric power generation systems are likely to replace traditional mechanical heat engines, offering an environmentally friendlier alternative. The use of low-dimensional, nanostructured materials can significantly increase the density of states near the Fermi level and greatly improve the thermoelectric properties of materials. In addition, the book demonstrates that it is possible to influence thermoelectric performance, establish more accurate mathematical models through the regulation of relevant parameters, and ultimately improve the thermoelectric figure of merit (ZT).