This book is intended for professionals, researchers, technicians and students who are newcomers to the field as well as those with experience. It will be an important resource in the following fields: surface science, electronic materials and processes, thin film deposition, surface compositional analysis and related topical areas such as corrosion, oxidation, reduction, adsorption, desorption, adhesion, epitaxial growth and contamination. The presentation uses a tutorial and pedagogical approach.