Superhigh Frequency Generators of Plasma describes the basic physical processes defining the properties and characteristics of SHF-discharges at pressures from 100 Pa to atmospheric. It provides a detailed analysis of propagation mechanisms of the discharge front in atomic and molecular gases, and it examines specific forms of discharges in external magnetic fields and under conditions of combined effect by SHF- and dc-electric fields. Methods for calculating the intensity of electric SSHF-fields and their energy efficiency in a plasma for different schemes of SHF-plasma generators are described. The book incorporates examples demonstrating the possibilities of utilizing SHF-discharges in modern technology, including one illustrating the preparation of finely divided powders of titanium, zirconium, and hafnium nitrides. Superhigh Frequency Generators of Plasma will benefit researchers and engineers dealing with the physics of plasma and plasma technologies, in addition to students interested in the topic.