Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. Electromechanical actuators directly transform input electrical energy into mechanical energy. Piezoelectric and electrostrictive ceramics are widely used in applications requiring high generative force, high frequency operation, accurate displacement, quick response time, or small device size. This book presents important progress in growth and structure-property studies in ferroelectrics with a high Curie temperature (Tc).