Springer Sivumäärä: 500 sivua Asu: Kovakantinen kirja Painos: 2014 Julkaisuvuosi: 2013, 28.07.2013 (lisätietoa) Kieli: Englanti
Advances in micro and nano technology have increased the demand for miniaturized sensors, actuators, and other non-electronic MEMS that require assembly and packaging. "Multiscale Robotics for Microsystems Manufacturing" presents a new framework in micro automation based on robotic, or robotic-assisted, assembly and packaging. This volume ties concepts in precision engineering, control engineering, and MEMS together in a unique manner. The material covered begins with an introduction to microsystems and applications including heterogeneous MEMS assembly and miniaturization. In order to provide a link between MEMS and robotics, a detailed discussion of precision robotics and micro assembly is presented. This material is followed by a discussion of an automated micro robotic cells for microsystems manufacturing and MEMS assembly, along with design specifications and system architectures.
